Design and Fabrication of Low-Power Planar Type Gas Sensor
In this paper we describe the fabrication steps and the implementation of a planar type gas sensing applications with suspended structure, which presents very low power consumption. Simulations with the finite element model tool show homogeneous temperature distribution across the sensitive film. The device attached with a spin-coated thin layer of SnO2 showed a reasonable sensing performance to hydrogen.
Z. L. Zhang et al., "Design and Fabrication of Low-Power Planar Type Gas Sensor", Materials Science Forum, Vol. 694, pp. 580-584, 2011