Structural Properties and Microstructures of SrTiO3/SrTi1-xNbxO3 Superlattices Grown by Ion Beam Deposition

Abstract:

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Superlattice structure of SrTiO3 and Nb-doped SrTiO3 have been epitaxially grown on atomically flat surface of LaAlO3 substrates by ion beam deposition method. Epitaxial superlattices were grown at 800 °C in the presence of partial oxygen pressure under optimizing growth conditions. The Nb-doped SrTiO3 layers were varied from 2 to 15 unit cell thickness approximately, while SrTiO3 layers are maintained at 15 unit cell thickness with 10 periods. The superlattices with various Nb-doped SrTiO3 layer thicknesses were investigated using X-ray diffractometer (XRD) and atomic force microscope (AFM), in order to clearly understand structural properties and surface structure, which are significant for fabrication of the high quality superlattice structure.

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Periodical:

Edited by:

Hyungsun Kim, Jian Feng Yang, Chuleol Hee Han, Somchai Thongtem and Soo Wohn Lee

Pages:

598-601

DOI:

10.4028/www.scientific.net/MSF.695.598

Citation:

G. Panomsuwan et al., "Structural Properties and Microstructures of SrTiO3/SrTi1-xNbxO3 Superlattices Grown by Ion Beam Deposition", Materials Science Forum, Vol. 695, pp. 598-601, 2011

Online since:

July 2011

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$35.00

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