Structural Properties and Microstructures of SrTiO₃/SrTi_1-xNb_xO₃ Superlattices Grown by Ion Beam Deposition

Abstract:

Superlattice structure of SrTiO₃ and Nb-doped SrTiO₃ have been epitaxially grown on atomically flat surface of LaAlO₃ substrates by ion beam deposition method. Epitaxial superlattices were grown at 800 °C in the presence of partial oxygen pressure under optimizing growth conditions. The Nb-doped SrTiO₃ layers were varied from 2 to 15 unit cell thickness approximately, while SrTiO₃ layers are maintained at 15 unit cell thickness with 10 periods. The superlattices with various Nb-doped SrTiO₃ layer thicknesses were investigated using X-ray diffractometer (XRD) and atomic force microscope (AFM), in order to clearly understand structural properties and surface structure, which are significant for fabrication of the high quality superlattice structure.

• Periodical: Materials Science Forum (Volume 695)
• Pages: 598-601
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.695.598
• Online since: July 2011
• Authors: Gasidit Panomsuwan, Nagahiro Saito, Osamu Takai
• Keywords: Ion Beam Deposition, Perovskite Oxide, SrTiO₃, Superlattice

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DOI: 10.1109/20.908643