Structural Properties and Microstructures of SrTiO3/SrTi1-xNbxO3 Superlattices Grown by Ion Beam Deposition
Superlattice structure of SrTiO3 and Nb-doped SrTiO3 have been epitaxially grown on atomically flat surface of LaAlO3 substrates by ion beam deposition method. Epitaxial superlattices were grown at 800 °C in the presence of partial oxygen pressure under optimizing growth conditions. The Nb-doped SrTiO3 layers were varied from 2 to 15 unit cell thickness approximately, while SrTiO3 layers are maintained at 15 unit cell thickness with 10 periods. The superlattices with various Nb-doped SrTiO3 layer thicknesses were investigated using X-ray diffractometer (XRD) and atomic force microscope (AFM), in order to clearly understand structural properties and surface structure, which are significant for fabrication of the high quality superlattice structure.
Hyungsun Kim, Jian Feng Yang, Chuleol Hee Han, Somchai Thongtem and Soo Wohn Lee
G. Panomsuwan et al., "Structural Properties and Microstructures of SrTiO3/SrTi1-xNbxO3 Superlattices Grown by Ion Beam Deposition", Materials Science Forum, Vol. 695, pp. 598-601, 2011