Effect of Sputtering Current on Growth and Microstructure for Titanium Alloy Coatings onto SiC

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Abstract:

The influences of sputtering current on deposition rate, composition, microstructure evolution and growth mechanism for titanium alloy coatings onto SiC fibers are explored by surface profiler, auger electron spectrometer, X-ray diffraction, scanning electron microscopy and atomic force microscope. The experimental results show that crystallization take place in all coatings with hexagonal structure (α-Ti). As sputtering current is increased, deposition rate and Al content increase, and Ti content decreases. Coating growth mode alsotransforms from V-shaped column grains to equiaxed grains as sputtering current increased. The column grains are generally not single grains, and more nanograins are composed

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Materials Science Forum (Volumes 747-748)

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866-871

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February 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.1116/1.1601610

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