Effect of Microwave Irradiation on Rapid Crystallization of Ferroelectric Lead Zirconate Titanate Thin Films

Xian Wei Wang; Zhan Jie Wang; Yan Na Chen; Yu Qing Zhang; Zhi Dong Zhang

doi:10.4028/www.scientific.net/MSF.750.220

Paper Titles

Thermal Residual Stress and Tensile Strength of UACS/Al Laminate with Different Slit Angles
p.204

Effects of Slit Patterns on the Tensile Properties of Unidirectionally Arrayed Chopped Strands Composites
p.208

Effect of Substrate on Crystallization of Sol-Gel-Derived Pb(Zr_0.52Ti_0.48)O₃ Thin Films by Microwave Annealing
p.212

Structure Simulation Calculation of Impurities B with Fe, Al or Ca in Metallurgical Grade Silicon
p.216

Effect of Microwave Irradiation on Rapid Crystallization of Ferroelectric Lead Zirconate Titanate Thin Films
p.220

Preparation of Paver Bricks Having both Water Retainability and Frost Resistance by Designing Macro Porous Structure
p.224

Optimization of Process Parameters for Unidirectional Solidification of Magnesium Alloy
p.228

Notch Effects in High Cycle Fatigue of Ti-6Al-4V
p.232

Investigation for Small Shear-Mode Fatigue Cracks in Bearing Steels
p.236

HomeMaterials Science ForumMaterials Science Forum Vol. 750Effect of Microwave Irradiation on Rapid...

Effect of Microwave Irradiation on Rapid Crystallization of Ferroelectric Lead Zirconate Titanate Thin Films

Abstract:

Ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) thin films rapidly crystallized by microwave irradiation were compared with those obtained by conventional furnace process. The PZT films under microwave irradiation at 650 °C for 60 s were crystallized well in to the perovskite phase, and showed butter electrical properties than those crystallized by conventional furnace annealing at 650 °C for 30 min. It is clear that microwave irradiation is effective for obtaining well-crystallized PZT films with good properties in a short process time.

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Materials Science Forum (Volume 750)

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220-223

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.750.220

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Online since:

March 2013

Authors:

Xian Wei Wang, Zhan Jie Wang, Yan Na Chen, Yu Qing Zhang, Zhi Dong Zhang

Keywords:

Crystallization, Ferroelectric, Microstructure, Microwave Annealing (MWA), Pb(Zr_0.52Ti_0.48)O₃ Thin Films, Sol-Gel Method

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