Relationship between Nitrogen Content and Mechanical Properties in Al_1-xCr_xN_y Thin Films

Abstract:

To get further insight into Nitrogen stoichiometry influence which is of utmost importance since it influences the phase structure and consequently the mechanical properties of the AlCrN coatings, we carried out a systematically study of AlCrN coatings comprising coatings production, mechanical properties survey, and composition and phase structure characterizations. Al_1-xCr_xN_y thin films have been synthesized by two physical vapour deposition - PVD systems: ion- beam (IBS) and magnetron sputtering (MS). Composition of the coatings was studied by both Energy Dispersive X- ray Spectrometer (EDXS) and Rutherford Backscattering Spectroscopy (RBS), the latter technique being very sensitive to light elements such as nitrogen. Most compositions are revealed to be sub- stoichiometric with Nitrogen (y 1-xCr_xN_y films show a similar coefficients of friction (COF) evolution with average values observed between 0.4 – 0.8 depending on the nitrogen content.

• Periodical: Materials Science Forum (Volume 761)
• Pages: 165-170
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.761.165
• Online since: July 2013
• Authors: Thi Huyen Tram Pham, Fabien Paumier, Eric Le Bourhis, Philippe Goudeau
• Keywords: AlCrN Film, Mechanical Property, Sputtering Techniques

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