Hydrogen Loss and Interdiffusion in Amorphous Si/SiC Multlayers

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Periodical:

Materials Science Forum (Volumes 79-82)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

887-892

Citation:

G. Zorn et al., "Hydrogen Loss and Interdiffusion in Amorphous Si/SiC Multlayers", Materials Science Forum, Vols. 79-82, pp. 887-892, 1991

Online since:

January 1991

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