Structure of TiN Thin Film Grains in Dependence on their Crystallographic Orientation

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Periodical:

Materials Science Forum (Volumes 79-82)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

903-908

DOI:

10.4028/www.scientific.net/MSF.79-82.903

Citation:

V. Valvoda et al., "Structure of TiN Thin Film Grains in Dependence on their Crystallographic Orientation", Materials Science Forum, Vols. 79-82, pp. 903-908, 1991

Online since:

January 1991

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$35.00

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