Observation of Annealing Effects in Ti/TiN-Diffusion Barriers using High-Temperature X-Ray Diffraction

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Periodical:

Materials Science Forum (Volumes 79-82)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

893-902

Citation:

G. Zorn and H. Joswig, "Observation of Annealing Effects in Ti/TiN-Diffusion Barriers using High-Temperature X-Ray Diffraction", Materials Science Forum, Vols. 79-82, pp. 893-902, 1991

Online since:

January 1991

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$38.00

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