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HomeMaterials Science ForumMaterials Science Forum Vols. 79-82Observation of Annealing Effects in...

Observation of Annealing Effects in Ti/TiN-Diffusion Barriers using High-Temperature X-Ray Diffraction

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Periodical:

Materials Science Forum (Volumes 79-82)

Pages:

893-902

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.79-82.893

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Online since:

January 1991

Authors:

G. Zorn, H. Joswig

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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