EBSD Sample Preparation: High Energy Ar Ion Milling

Zoltán Dankházi; Szilvia Kalácska; Adrienn Baris; Gábor Varga; Zsolt Radi; Károly Havancsák

doi:10.4028/www.scientific.net/MSF.812.309

Paper Titles

Effect of High Energy Ar-Ion Milling on Surface of Quenched Low-Carbon Low-Alloyed Steel
p.285

Examination of Thermodynamic Realignments of Metals and Metal-Alloys, by DMTA Technique
p.291

A Method for the Determination of Ferrite Grains with a Surface Normal close to the (111) Orientation in Cold Rolled Steel Samples with Color Etching and Optical Microscopy
p.297

Innovative Residual Stress Measurements by X-Ray Diffraction
p.303

EBSD Sample Preparation: High Energy Ar Ion Milling
p.309

Cold Rolling Effect on Microstructure and Mechanical Properties of Low Carbon Al-Killed Steels
p.315

Residual Stress in Plain Carbon Steel Induced by Laser Hardening
p.321

Comparative Corrosion Study on Silver Coated Metallic Implants
p.327

Electrochemical Impedance Spectroscopy as a Prospective Tool for the Characterization of the Intermetallic Microstructure of Lead Free Solder
p.333

HomeMaterials Science ForumMaterials Science Forum Vol. 812EBSD Sample Preparation: High Energy Ar Ion...

EBSD Sample Preparation: High Energy Ar Ion Milling

Abstract:

Surface quality development on series of metal samples was investigated using a new Ar ion milling apparatus. The surface quality of samples was characterized by the image quality (IQ) parameter of the electron backscatter diffraction (EBSD) measurement. Ar ion polishing recipes have provided to prepare a surface appropriate for high quality EBSD mapping. The initial surfaces of samples were roughly grinded and polished. High quality surface smoothness could be achieved during the subsequent Ar ion polishing treatment. The optimal angles of Ar ion incidence and the polishing times were determined for several materials.

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Periodical:

Materials Science Forum (Volume 812)

Pages:

309-314

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.812.309

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Online since:

February 2015

Authors:

Zoltán Dankházi*, Szilvia Kalácska, Adrienn Baris, Gábor Varga, Zsolt Radi, Károly Havancsák

Keywords:

EBSD, Ion Milling, Sample Preparation, SEM

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