Influence of Temperatures on the Formation of SiBCN Powders Prepared by CVD Using Borazine and Liquid Polycarbosilane

Abstract:

SiBCN powders have been prepared by chemical vapor deposition using borazine and liquid polycarbosilane as source precursors in the deposition temperature range from 800 °C to 1100 °C, with the pressure of 10 kPa. The effect of the temperatures on the surface morphologies of the as-received powders was investigated by SEM. FTIR analysis of the powders was used to obtain the composition of the powders, and the XRD analysis was used to determine the crystalline state of the deposits. The results showed the powders were amorphous and composed of normally spherical grains.

• Periodical: Materials Science Forum (Volume 816)
• Pages: 182-185
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.816.182
• Online since: April 2015
• Authors: Xun Sun*, Jun Sheng Li, Hai Feng Cheng
• Keywords: Borazine, Chemical Vapor Deposition (CVD), Deposition Temperature, Liquid Polycarbosilane

References

[1] Pengfei Zhang, Dechang Jia, Zhihua Yang, et al., Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites, J. Adv. Ceram. 1(3) (2012) 157-178.

DOI: 10.1007/s40145-012-0017-x

[2] Ningbo Liao, Wei Xue, Hongming Zhou, et al., Numerical investigation into the nanostructure and mechanical properties of amorphous SiBCN ceramics, RSC. Adv. 10 (2013) 1039-1046.

DOI: 10.1039/c3ra40355f

[3] See Hoon Lee, Markus Weinmann, Fritz Aldinger, Processing and properties of C/Si–B–C–N fiber–reinforced ceramic matrix composites prepared by precursor impregnation and pyrolysis, Acta Mater. 56 (2008) 1529-1538.

DOI: 10.1016/j.actamat.2007.12.001

[4] Baldus HP, Wagner O, Jansen M. Synthesis of advanced ceramics in the systems Si-B-N and Si-B-N-C employing novel precursor compounds. Mater. Res. Symp. Proc. 271(1992) 821-826.

DOI: 10.1557/proc-271-821

[5] Wideman T, Su K, Remsen EE, et al., Synthesis, characterization and ceramic conversion reactions of borazine/silazane copolymers-new polymeric precursors to sincb ceramics. Chem. Mater. 7 (1995) 2203-2212.

DOI: 10.1021/cm00059a032

[6] Weinmann M, Haug R, Bill J, et al., Boron-containing polysilylcarbodi-imides: A new class of molecular precursors for Si-B-C-N ceramics. J. Organomet. Chem. 541 (1997) 345-353.

DOI: 10.1016/s0022-328x(97)00085-5

[7] Muller A, Gerstel P, Weinmann M, et al., Correlation of boron content and high temperature stability in Si-B-C-N ceramics. J. Eur. Ceram. Soc. 20 (2000) 2655-2659.

DOI: 10.1016/s0955-2219(00)00131-x

[8] Riedel R, Kienzle A, Dressler W, et al., A silicoboron carbonitride ceramic stable to 2, 000°C. Nature 382 (1996) 796-798.

DOI: 10.1038/382796a0

[9] Weinmann M, Schuhmacher J, Kummer H, et al., Synthesis and thermal behavior of novel Si-B-C-N ceramic precursors. Chem. Mater . 12 (2000) 623-632.

DOI: 10.1021/cm9910299

[10] Kumar R, Cai Y, Gerstel P, et al., Processing, crystallization and characterization of polymer derived nano-crystalline Si-B-C-N ceramics. J. Mater. Sci. 41(2006) 7088-7095.

DOI: 10.1007/s10853-006-0934-6

[11] Paolo Colombo, Polymer-Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics. J. Am. Ceram. Soc. 93 (2010)1805–1837.

[12] Jun-Sheng Li , Chang-Rui Zhang, Bin Li, et al., Boron nitride coatings by chemical vapor deposition from borazine. Surf. Coat. Technol. 205 (2011) 3736-3741.

DOI: 10.1016/j.surfcoat.2011.01.032

[13] Jun-Sheng Li , Chang-Rui Zhang, Bin Li, et al., BN coatings processed from borazine by chemical vapor deposition. Appl. Surf. Sci. 257 (2011) 7752-7757.

[14] Haitao Liu, Hao Tian, Mechanical and microwave dielectric properties of SiCf/SiC composites with BN interphase prepared by dip-coating process. J. Eur. Ceram. Soc. 32 (2012) 2505-2512.

DOI: 10.1016/j.jeurceramsoc.2012.02.009

[15] Wilden J, Wank A, TPCVD synthesis of Si(-B)-C-N coatings. In ISPC 15. (2001).

[16] Cinibulk MK, Parthasarathy TA, Characterization of oxidized polymer-derived SiBCN fibers. J . Am. Ceram. Soc. 84 (2001) 2197-2202.

DOI: 10.1111/j.1151-2916.2001.tb00987.x

[17] Jansen M, Highly stable ceramics through single source precursors. Solid. State. Ion. 101 (1997) 1-7.

DOI: 10.1016/s0167-2738(97)84001-5

[18] Aldinger F, Weinmann M, Bill J. Precursor-derived Si-B-C-N ceramics. Anglais. 70 (1998) 439-448.

DOI: 10.1351/pac199870020439

[19] Bill J, Aldinger F. Precursor-derived covalent ceramics. Adv. Mater. 7 (1995) 775-787.

DOI: 10.1002/adma.19950070903

[20] Jun-sheng Li, Chang-rui Zhang, Bin Li, et al., An Improved Synthesis of Borazine with Aluminum Chloride as Catalyst. Eur. J. Inorg. Chem. 12 (2010) 1763-1766.

DOI: 10.1002/ejic.201000015

[21] Anita Muller, Jiangqiang Peng, Hans Jurgen Seifert, et. al., Si-B-C-N Ceramic Precursors Derived from Dichlorodivinylsilane and Chlorotrivinylsilane. 2. Ceramization of Polymers and High Temperature Behavior of Ceramic Materials. Chem. Mater. 14 (2002).

DOI: 10.1021/cm021179a