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HomeMaterials Science ForumMaterials Science Forum Vols. 83-87On the Determination of Nitrogen in Czochralski...

On the Determination of Nitrogen in Czochralski Silicon

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Defects in Semiconductors 16

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Periodical:

Materials Science Forum (Volumes 83-87)

Pages:

263-268

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.83-87.263

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Online since:

January 1992

Authors:

M.W. Qi, T.S. Shi, S.S. Tan, Bin Zhu, P. Cai, Long Quan Liu, Duan Lin Que, L.B. Li

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© 1992 Trans Tech Publications Ltd. All Rights Reserved

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