On the Determination of Nitrogen in Czochralski Silicon

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 83-87)

Edited by:

Gordon Davies, G.G. DeLeo and M. Stavola

Pages:

263-268

Citation:

M.W. Qi et al., "On the Determination of Nitrogen in Czochralski Silicon", Materials Science Forum, Vols. 83-87, pp. 263-268, 1992

Online since:

January 1992

Export:

Price:

$38.00

Fetching data from Crossref.
This may take some time to load.