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HomeMaterials Science ForumMaterials Science Forum Vols. 83-87Unintentional Hydrogenation of III-V...

Unintentional Hydrogenation of III-V Semiconductors during Device Processing

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Defects in Semiconductors 16

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Periodical:

Materials Science Forum (Volumes 83-87)

Pages:

617-622

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.83-87.617

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Online since:

January 1992

Authors:

Stephen J. Pearton, C.R. Abernathy, W.S. Hobson, U.K. Chakrabarti, J. Lopata, D.M. Kozuch, Michael Stavola

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© 1992 Trans Tech Publications Ltd. All Rights Reserved

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