Numerical Simulation of Polysilicon Chemical Vapor Deposition in Siemens Reactor

Abstract:

The Siemens CVD reactor should be refined when addressing the low energy consumption requirement for the production of solar grade polysilicon. The object of this paper is to investigate the heat transfer in Siemens reactor, which will provide the theoretical guidance for saving energy of polysilicon scale production. Based on Discrete Ordinates (DO) radiation model, an analysis is presented which studies the radiation exchange between the hot polysilicon rods and the cold reactor wall of four typical reactor configurations, especially the variation of the average power emitted per rod under various conditions of different rod diameter and wall emissivity. The results show that the energy consumption can be reduced by decreasing the emissivity of the reactor wall and enlarging the reactor capacity.

• Periodical: Materials Science Forum (Volume 833)
• Pages: 107-111
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.833.107
• Online since: November 2015
• Authors: Zhi Feng Nie, Gang Xie*, Yan Qing Hou, Yan Cui, Zhan Liang Yu, Lin Tian
• Keywords: A1, Chemical Vapor Deposition Processes B1, Computer Simulations A1, Polysilicon, Radiation A3

References

[1] G. R. Timilsina, L. Kurdgelashvili, P. A. Narbel, Solar energy: Markets, economics and policies, Renewable and Sustainable Energy Reviews 16(1) (2012) 449-465.

DOI: 10.1016/j.rser.2011.08.009

[2] S. Pizzini, Towards solar grade silicon: Challenges and benefits for low cost photovoltaics, Solar Energy Materials and Solar Cells 94(9) (2010)1528-1533.

DOI: 10.1016/j.solmat.2010.01.016

[3] G. Bye, B. Ceccaroli, Solar grade silicon: Technology status and industrial trends, Solar Energy Materials and Solar Cells 130(2014) 634-646.

DOI: 10.1016/j.solmat.2014.06.019

[4] Filtvedt W O, Javidi M, Holt A, et al. Development of fluidized bed reactors for silicon production, Solar Energy Materials and Solar Cells 94(2010) 1980-(1995).

DOI: 10.1016/j.solmat.2010.07.027

[5] Johannes B, The polysilicon market–perspectives on demand, supply and production technologies, Silicon for the Chemical and Solar Industry 11(2012) 281–284.

[6] A. Ramos, C. del Cañizo, J. Valdehita, J.C. Zamorano, A. Luque, Radiation heat savings in polysilicon production: Validation of results through a CVD laboratory prototype, Journal of Crystal Growth 374(2013) 5-10.

DOI: 10.1016/j.jcrysgro.2013.03.043

[7] Z. Q. Huang, H. Ding, X. J. Wang, C. J. Liu, Numerical solution for radiative heat transfer in a novel polysilicon CVD reactor. Numerical Heat Transfer; Part A: Applications 64(2013) 744-758.

DOI: 10.1080/10407782.2013.798206

[8] Z. F. Nie, G. Xie, Y.Q. Hou, Y. Cui, R.X. Li, D.M. Song, Numerical simulation of radiation exchange in Siemens CVD reactor, Journal of Synthetic Crystals 43(07) (2014) 1774-1780.

[9] Coso G D, Cañizo C D, Luque A. Radiative Energy Loss in a Polysilicon CVD Reactor. Solar Energy Materials and Solar Cells 95(2011) 1042-1049.

DOI: 10.1016/j.solmat.2010.10.001

[10] Bird R B., Steward W. E. and Lightfoot E. N., Transport Phenomena, second ed., John Wiley & Sons, Inc., New York, (2002).