Laser-Assisted Waterjet Microgrooving of Silicon Nitride Ceramics with near Damage-Free

Abstract:

A new processing technology is used in micromachining silicon nitride ceramics for improving the processing efficiency. Laser-assisted waterjet machining technology with near damage-free plays an important role in reducing the heat-affected zone (HAZ). In order to understand the effects of process parameters, such as pulse energy, waterjet offset distance and water pressure, on microgrooving of silicon nitride ceramics and the machining performance, a full-factorial experiment with the comparison experiment has been carried out in this study for analyzing and discussing the groove geometry, the surface quality and HAZ width. It can be concluded that the laser-assisted waterjet processing technology can expel more material removal with near damage-free.

• Periodical: Materials Science Forum (Volume 861)
• Pages: 69-74
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.861.69
• Online since: July 2016
• Authors: Liang Wang, Chuan Zhen Huang*, Jun Wang, Hong Tao Zhu, Peng Yao
• Keywords: Damage-Free, Laser-Assisted Waterjet, Microgrooving, Silicon Nitride Ceramics

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