Synthesis of Transition Metals Carbide Compounds in the Vacuum Arc Discharge Plasma

Abstract:

To implement the plasmochemical synthesis of transition metals (Ti, Zr, Mo, W) carbide compounds in a plasma flux of the vacuum arc the discharge carbonaceous working gas is infused. It is shown that the composition of the initial carbonaceous gas defines both the carbon output, and the nature and course of the carbide compounds formation chemical reaction. The composition analysis of the plasma flux in the course of the coating evaporation was carried out by means of the developed emissive spectral analyzer. The result shows that a considerable part of transition metals carbide phases has wide zones of homogeneity within which the change in the carbon content happens without the crystalline grid reorganization. The work reveals and analyzes the factors defining quality of the received carbide compounds (TiC, ZrC, MoC, WC) of refractory metals in a flux of metal plasma of the vacuum arc discharge.

• Periodical: Materials Science Forum (Volume 870)
• Pages: 371-376
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.870.371
• Online since: September 2016
• Authors: D.K. Kostrin*, A.A. Lisenkov
• Keywords: Carbide Phase, Plasmochemical Synthesis, Steam Plasma Flux, Vacuum Arc Discharge

References

[1] V.I. Rakhovsky, Physical bases of switching of electric current in vacuum, Moscow, Science, (1970).

[2] J.M. Lafferty, Vacuum arcs. Theory and Applications, New York, Wiley, (1980).

[3] G.A. Mesyats, Ectons, Ekaterinburg, UIF Science, (1993).

[4] А.А. Lisenkov, V.P. Valuev, Vacuum Arc Discharge on Integrally Cold Cathode, Vakuum in Forschung und Praxis. 6 (2011) 32-36.

DOI: 10.1002/vipr.201100474

[5] D.K. Kostrin, A.A. Lisenkov, Surface Modification by Vacuum Arc Plasma Source, Materials Science Forum. 843 (2016) 278-283.

DOI: 10.4028/www.scientific.net/msf.843.278

[6] P.A. Tesner, Formation of carbon from hydrocarbons of a gas phase, Moscow, Chemistry, (1972).

[7] А.А. Lisenkov, Plasmochemical synthesis of compounds in the metal plasma of a vacuum arc discharge, Vacuum technique and technology. 3 (2006) 207-214.

[8] А.А. Lisenkov, N.M. Radtsig, S.A. Trifonov, Features of plasmochemical synthesis of compounds based on carbon in the vacuum-arc discharge plasma, Vacuum technique and technology. 4 (2012) 253-258.

[9] Yu.A. Bystrov, N.Z. Vetrov, А.А. Lisenkov, Plasmachemical synthesis of carbide compounds in metal-containing plasma jet from vacuum arc discharge, Technical Physics Letters. 9 (2008) 734-736.

DOI: 10.1134/s1063785008090046

[10] Yu.A. Bystrov, D.K. Kostrin, А.А. Lisenkov, Spectrometric analysis of the plasma flow of vacuum arc discharge, Vacuum technique and technology. 1 (2014) 164-166.

[11] A.A. Uhov, V.A. Gerasimov, D.K. Kostrin, L.M. Selivanov, Use of compact spectrometer for plasma emission qualitative analysis, Journal of Physics: Conference Series. 567 (2014) 012039.

DOI: 10.1088/1742-6596/567/1/012039

[12] Yu.A. Bystrov, N.Z. Vetrov, A.A. Lisenkov, D.K. Kostrin, Technological Capabilities of Vacuum Arc Plasma Sources: Plasmochemical Synthesis of Nitride Compounds, Vakuum in Forschung und Praxis. 5 (2014) 19-23.

DOI: 10.1002/vipr.201400563

[13] Yu.A. Bystrov, N.Z. Vetrov, A.A. Lisenkov, Plasmachemical synthesis of titanium carbide on copper substrates, Technical Physics Letters. 8 (2011) 707-709.

DOI: 10.1134/s1063785011080050