Quantitative Analysis of the Micro Friction of Single Crystal Silicon

Abstract:

The single-asperity friction of polished single crystal silicon using a cone with a spherical apex tip was quantitatively studied concerning the influence of normal load and scratching cycles. Specific friction equations were presented and the interfacial friction equations were determined by fitting the experiment data obtained in the scratching tests. The influence of different scratch conditions to both the interfacial fiction and the plowing friction was analyzed. This paper aims to understand the mechanisms of friction and material removal of single crystal silicon in micro and nanocutting or polishing.

• Periodical: Materials Science Forum (Volume 874)
• Pages: 375-380
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.874.375
• Online since: October 2016
• Authors: Ru Tian, Hong Tao Zhu*, Chuan Zhen Huang, Jun Wang, Ao Liu, Pei Qi Ge, Peng Yao, Han Lian Liu, Bin Zou
• Keywords: Interfacial Friction, Micro Scratch, Plowing Friction, Single Crystal Silicon

References

[1] L. Vieira et al., Scratch Testing for Micro- and Nanoscale Evaluation of Tribocharging in DLC Films Containing Silver Nanoparticles Using AFM and KPFM Techniques, J. Surface and Coatings Technology. 260 (2014) 205-213.

DOI: 10.1016/j.surfcoat.2014.06.065

[2] YAN Yong-da et al., AFM-based Nanoscratch Test, J. Nanotechnology and Engineering. 6 (2008) 356-361.

[3] T.W. Scharf et al., Monitoring Transfer Films and Friction Instabilities with In Situ Raman Tribometry , J. Tribology Letters. 14 (2003) 3-8.

[4] D. Marchetto et al., AFM investigation of tribological properties of nano-patterned silicon surface, J. Wear. 265 (2008) 577-582.

DOI: 10.1016/j.wear.2007.12.010

[5] Han Jiang et al., Influence of Surface Roughness and Contact Load on Friction Coefficient and Scratch Behavior of Thermoplastic Olefins, J. Applied Surface Science. 254 (2008) 4494-4499.

DOI: 10.1016/j.apsusc.2008.01.067

[6] Maneesh Mishra et al., Analytical Model for Plowing Friction at Nanoscale, J. Tribology Letters. 45 (2012) 417-426.

DOI: 10.1007/s11249-011-9899-y

[7] Kenneth Holmberg et al., Topographical Orientation Effects on Friction and Wear in Sliding DLC and Steel Contacts, part 1: Experimental, J. Wear. 3-22 (2015) 330-331.

DOI: 10.1016/j.wear.2015.02.014

[8] N.K. Myshkin et al., Tribology of Polymers: Adhesion, Friction, Wear, and Mass-transfer, J. Tribology International. 38 (2006) 910-921.

DOI: 10.1016/j.triboint.2005.07.016

[9] L.M. Qian et al., Nanotribology, Science Press, (2003).

[10] Bharat Bhushan et al., Thin-film Friction and Adhesion Studies Using Atomic Force Microscopy, J. Journal of applied physics. 87 (2000) 1201-1210.

DOI: 10.1063/1.371998

[11] Bharat Bhushan et al., Nanotribology and Nanomechanics, J. Wear. 259 (2005) 1507-1531.

DOI: 10.1016/j.wear.2005.01.010

[12] Pengzhe Zhu et al., Study of Effect of Indenter Shape in Nanometric Scratching Process Using Molecular Dynamics, J. Materials Science and Engineering A. 528 (2011) 4522-4527.

DOI: 10.1016/j.msea.2011.02.035

[13] Ampere A. Tseng et al., Scratch Direction and Threshold Force in Nanoscale Scratching Using Atomic Force Microscopes, J. Applied Surface Science. 257 (2011) 9243-9250.

DOI: 10.1016/j.apsusc.2011.04.065

[14] Jiaxin Yu et al., Hailong Hu, Quantitative Investigation on Single-asperity Friction and Wear of Phosphate Laser Glass Against A Spherical AFM Diamond Tip, J. Tribology International. 81 (2015) 43-52.

DOI: 10.1016/j.triboint.2014.07.020

[15] Yanquan Geng et al., Depth Prediction Model of Nano-grooves Fabricated by AFM-based Multi-passes Scratching Method, J. Applied Surface Science. 313 (2014) 615-623.

DOI: 10.1016/j.apsusc.2014.06.033

[16] Yanquan Geng et al., Modelling and Experimental Study of Machined Depth in AFM-based Milling of Nanochannels, J. International Journal of Machine Tools and Manufacture. 73 (2013) 87-96.

DOI: 10.1016/j.ijmachtools.2013.07.001

[17] Yifang Cao et al., Nanoindentation Measurements of The Mechanical Properties of Polycrystalline Au and Ag Thin Films on Silicon Substrates: Effects of Grain Size and Film Thickness, J. Materials Science and Engineering A. 427 (2006) 232-240.

DOI: 10.1016/j.msea.2006.04.080