Comparison of Self-Annealing Behaviors in (001)- and (111)-Oriented Electrodeposited Silver Films by In Situ EBSP Analysis

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Self-annealing behaviors of the electrodeposited silver films which preferentially orient in (001) and (111) directions were investigated by in situ EBSP analysis. In the (001)-oriented film, self-annealing starts in storage for a few hours at R. T. and is almost complete after storage for 6 h at R. T. (001)- and (212)-oriented recrystallized grains mainly nucleate, and (001)-oriented grains mainly grow up. In the (111)-oriented film, self-annealing starts in storage for 15 min at R. T. and is almost complete after storage for 1 h at R. T. (111)-, (001)- and (212)-oriented recrystallized grains mainly nucleate, and (111)-oriented grains mainly grow up. The size of recrystallized grains induced in the (111)-oriented film by self-annealing is approximately half that in the (001)-oriented film although the rate of recrystallization in the (111)-oriented film is faster than that in the (001)-oriented one. The area fraction of the preferential orientation after completion of recrystallization saturates in approximately 70% and 50% in the (001)- and (111)-oriented films, respectively.

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2243-2248

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November 2016

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© 2017 Trans Tech Publications Ltd. All Rights Reserved

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