Effect of Doping Concentrations on Properties of Nb Doped ZnO (NZO) Ceramics Targets

Abstract:

Nb doped ZnO (NZO) ceramic targets were prepared by sintering in air for 3 hours. The morphologies, structure, densification behavior, mechanical and electrical properties of the sintered ceramic targets with different doping concentrations were investigated. The optimal doping concentration was obtained. The results indicated that the sintered NZO ceramic targets with doping amount of 1wt.% (1wt% Nb₂O₅) had optimum comprehensive properties, which was corresponding to an electrical resistivity of 1.87×10^-2Ω·cm, a relative density of 99.1%, a Vickers hardness of 320MPa and a bending strength of 72.8MPa. The NZO ceramic target has a potential to be used as a high-quality sputtering target to deposit ZnO-based transparent conductive films.

• Periodical: Materials Science Forum (Volume 898)
• Pages: 1804-1811
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.898.1804
• Online since: June 2017
• Authors: Wei Peng, Ting Ting Xu, Zuo Xiang Zhu, Fu Liang Shang, Sheng Hui Xie, Ling Gao, Hai Tao Yang*
• Keywords: Ceramic Targets, Doping, NZO, Sintering, Transparent Conductive Film

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