A study on the Surface Properties of Nitrogen Implanted H13 Steel by Plasma Immersion Ion Implantation

Abstract:

The near surface of the H13 steel was implanted by using Plasma immersion ion implantation (PIII) system at constant bias voltage of −20 kV with varying nitrogen (N+ ) ion dose (3, 6, 9, 12, 15×1017 ions/cm2 ). The surface properties of the N+ ion implanted steel were investigated by measuring the microhardness, wear loss and friction coefficient. As increasing N+ ion dose (12×1017 ions/cm2), both wear property and surface hardness were increased. However, these properties were decreased as the incident ion dose increased over 12×1017 ions/cm2. The elemental depth profile and surface roughness were obtained with X-ray photoelectron spectroscopy (XPS) and surface roughness tester, respectively.

• Periodical: Solid State Phenomena (Volume 118)
• Pages: 275-280
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.118.275
• Online since: December 2006
• Authors: Y.Z. You, D.I. Kim, H.G. Chun
• Keywords: Friction, Microhardness, Plasma Immersion Ion Implantation

References

[1] Y. Nishimura and Y. Horino: Surf. Coat. Technol. Vol. 156 (2002), p.50.

[2] R. Adler and S. Picraux: Nucl. Instrum. Methods Phys. Res. Vol. B6 (1985), p.123.

[3] J. Conrad, J. Radtk and R. Dodd: J. Appl. Phys. Vol. 62 (1987), p.4591.

[4] B. Larisch, U. Brusky and H. Spies: Surf. Coat. Technol. Vol. 205 (1999), p.205.

[5] A. Anders ed.: Handbook of Plasma Immersion Ion Implantation and Deposition, . New York, John Wiley & Sons, Inc (2000) PP155-161.

[6] J. K. Hirvonen ed.: Ion Implantation, . New York, Academic Press(1980) PP17-50.