A study on the Surface Properties of Nitrogen Implanted H13 Steel by Plasma Immersion Ion Implantation
The near surface of the H13 steel was implanted by using Plasma immersion ion implantation (PIII) system at constant bias voltage of −20 kV with varying nitrogen (N+ ) ion dose (3, 6, 9, 12, 15×1017 ions/cm2 ). The surface properties of the N+ ion implanted steel were investigated by measuring the microhardness, wear loss and friction coefficient. As increasing N+ ion dose (12×1017 ions/cm2), both wear property and surface hardness were increased. However, these properties were decreased as the incident ion dose increased over 12×1017 ions/cm2. The elemental depth profile and surface roughness were obtained with X-ray photoelectron spectroscopy (XPS) and surface roughness tester, respectively.
Jang Hyun Sung, Chan Gyu Lee, Yong Zoo You, Young Kook Lee and Jae Young Kim
Y.Z. You et al., "A study on the Surface Properties of Nitrogen Implanted H13 Steel by Plasma Immersion Ion Implantation", Solid State Phenomena, Vol. 118, pp. 275-280, 2006