Development of Robust Microvavles for Compact Robust Pumps/Hydraulic Actuators
In situ UV-LIGA assembled robust micro check valves with large flow rates (>10 ml/s, displacement related), high-pressure support ability (>10 MPa) and high operational frequencies (>10 kHz) made of nano-structured nickel were presented in this paper. The microvalve consists of an array of 80 single micro valves to achieve the required flow rates. Test results show that the forward flow rate is about 19 ml/s under pressure of 90Psi. The backward flow rate is negligible. The reliability of the valve is ensured by the valve design and nanostructured nickel realized. The tested tensile strength of a nano structured nickel is about 1GPa. The strength of SU-8 is 50MPa, which is more than 50% higher that fabricated with a standard process.
Chunli BAI, Sishen XIE, Xing ZHU
B. Li and Q. Chen, "Development of Robust Microvavles for Compact Robust Pumps/Hydraulic Actuators", Solid State Phenomena, Vols. 121-123, pp. 1207-1210, 2007