Preparation and Properties of PZT Thin Films Produced by Decomposition of Metal Carboxylate Gels
In this work, PZT (Zr/Ti=52/48) thin films have been prepared using aqueous organic gel method. The desired metal cations are chelated in a solution using citric acid and ethylenediaminetertraacetic acid (EDTA) as the chelating agents. The thermal decompostion of the metal carboxylate precursors gels have been studied by TG/DTA and the products derived from calcinations of the gels at different temperatures have been characterized by XRD and SEM. By heat-treatment at 650°C for 2h, PZT thin films with smooth and crack-free surface could be achieved. The thickness of each layer was 50nm. Electric properties measurement indicated that the PZT films demonstrated a ferroelectric hysteresis loop. The remanent polarization(Pr) and coercive field (Ec) were 20.7μC/cm2 and 75.5kV/cm, respectively. The dielectric constant and the dielectric loss at 100 kHz of the films were 930 and 0.045, respectively.
Chunli BAI, Sishen XIE, Xing ZHU
J. P. Zhao et al., "Preparation and Properties of PZT Thin Films Produced by Decomposition of Metal Carboxylate Gels", Solid State Phenomena, Vols. 121-123, pp. 195-200, 2007