Characterization of Solid Tin Target for Gas Discharges Produced EUV Plasmas
In the development of our Z-pinch plasma EUV source, xenon (Xe) is used for the background gas discharges, and a solid tin (Sn) rod is used as target material due to its potential of high convention efficiency (CE) from input electric energy to EUV radiation [1, 2]. The Z-pinch plasma was driven by pulsed current with amplitude of 30 kA and pulse duration of 110 ns. Pinhole imaging, EUV spectrograph and in-band EUV energy monitor were used to characterize the EUV emission from the Z-pinch discharge. The experimental analyses have demonstrated the CE was as high as 3% .
Chunli BAI, Sishen XIE, Xing ZHU
C.H. Zhang et al., "Characterization of Solid Tin Target for Gas Discharges Produced EUV Plasmas", Solid State Phenomena, Vols. 121-123, pp. 885-888, 2007