The Structural and Optical Properties of Zinc Oxide Thin Films Deposited on PET Substrate by r.f. Magnetron Sputtering

Abstract:

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The transparent conducting films have been investigated extensively because of their excellent electrical and optical properties in many applications. For producing the LCD (Liquid Crystal Displays) and OLED (Organic Light-Emitting Diode), the transparent conductive films are mainly deposited on the glass. Using the plastic substrate has the advantages of low cost, light-weighted, and flexible characteristics; it is considered as the candidate substrate material for the portable and flexible LCD. The surface roughness measured by AFM was in the range 2.63~11.1nm. The result shows that the crystallite size increases with increasing the r.f. power. The microstructure of ZnO film has a proud (002) orientation. The average transmittance of ZnO film can be obtained over 80% in the visible spectrum. The lowest resistivity obtained is 4.0×10-3 ohm-cm. The adhesion between ZnO films and PET substrate is good because there is no separate observed in this study.

Info:

Periodical:

Solid State Phenomena (Volumes 121-123)

Edited by:

Chunli BAI, Sishen XIE, Xing ZHU

Pages:

971-974

DOI:

10.4028/www.scientific.net/SSP.121-123.971

Citation:

Y. M. Lu et al., "The Structural and Optical Properties of Zinc Oxide Thin Films Deposited on PET Substrate by r.f. Magnetron Sputtering", Solid State Phenomena, Vols. 121-123, pp. 971-974, 2007

Online since:

March 2007

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$35.00

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