Corrosion Protection of Aluminum Data Line in TFT-LCD Using Chemical Conversion Coating
In order to prevent pitting corrosions in aluminum thin film, zirconium incorporated chemical conversion coating on sputtered aluminum film was studied. Several pretreatment methods for conversion coating on the thin film were examined. There existed the optimum pretreatment and coating condition for successful growing of anticorrosive conversion coating layer in a given aggressive environment. Pit densities of aluminum thin films were significantly decreased with conversion coating. Electrochemical behaviors of conversion coated aluminum thin film were also discussed.
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park
J. H. Seo "Corrosion Protection of Aluminum Data Line in TFT-LCD Using Chemical Conversion Coating", Solid State Phenomena, Vols. 124-126, pp. 1553-1556, 2007