The ZnO seed precursor was prepared by sol-gel reaction. ZnO nanorod arrays were fabricated by solution chemical deposition on ZnO coated seed substrates. The substrates used are Si wafer, glass and PET. The fabricated ZnO nanorod had hexagonal morphology, length of 400~500 nm and diameter of 25~50 nm. The ZnO seeds were indispensable for the aligned growth of ZnO nanorod. The ZnO nanorod growth was dependent on the seeding method used but independent of the substrates. The structure of ZnO nanorod was characterized by FE-SEM, XRD and FE-TEM. This method enables large scale growth of ZnO arrays on all kinds of substrates including polymers.