Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing

Abstract:

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This article reports characteristics of plasmas sustained with LIA modules and profile control capabilities. Experiments with a meter-scale reactor demonstrated uniform plasma production to attain densities as high as 5x1011 cm-3 at an argon pressure of 1.3 Pa and an RF power of 4 kW. Design issues for large-area plasma sources with a scale-size of 3 m were also presented to exhibit the feasibility of novel large-area plasma sources to meet the requirements of the next-generation meters-scale processing.

Info:

Periodical:

Solid State Phenomena (Volume 127)

Edited by:

Masaaki Naka

Pages:

239-244

DOI:

10.4028/www.scientific.net/SSP.127.239

Citation:

Y. Setsuhara et al., "Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing", Solid State Phenomena, Vol. 127, pp. 239-244, 2007

Online since:

September 2007

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Price:

$35.00

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