Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing
This article reports characteristics of plasmas sustained with LIA modules and profile control capabilities. Experiments with a meter-scale reactor demonstrated uniform plasma production to attain densities as high as 5x1011 cm-3 at an argon pressure of 1.3 Pa and an RF power of 4 kW. Design issues for large-area plasma sources with a scale-size of 3 m were also presented to exhibit the feasibility of novel large-area plasma sources to meet the requirements of the next-generation meters-scale processing.
Y. Setsuhara et al., "Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing", Solid State Phenomena, Vol. 127, pp. 239-244, 2007