Finite Element Modeling and Simulation of Squeezed-Film Effects in a Vibrating MEMS Structure

Abstract:

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This paper presents results of numerical analysis of dynamics of a microstructure under the influence of air damping, which is modeled by linearized compressible Reynolds equation. Developed finite element model accounts for air rarefaction and is valid in a wide pressure range. Simulation results indicate that the influence of air damping may result not only in a pronounced dissipative effect but also in natural frequency shift due to system stiffening caused by air compression. This phenomenon is observed under combination of particular values of system and excitation parameters

Info:

Periodical:

Solid State Phenomena (Volumes 147-149)

Edited by:

Zdzislaw Gosiewski and Zbigniew Kulesza

Pages:

314-319

DOI:

10.4028/www.scientific.net/SSP.147-149.314

Citation:

R. Dauksevicius et al., "Finite Element Modeling and Simulation of Squeezed-Film Effects in a Vibrating MEMS Structure", Solid State Phenomena, Vols. 147-149, pp. 314-319, 2009

Online since:

January 2009

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Price:

$35.00

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