Finite Element Modeling and Simulation of Squeezed-Film Effects in a Vibrating MEMS Structure

Rolanas Dauksevicius; Vytautas Ostasevicius; Rimvydas Gaidys

doi:10.4028/www.scientific.net/SSP.147-149.314

Paper Titles

Permanent Magnet Chatter Absorber with Fuzzy Logic Control
p.290

Simulation of Hydrodynamics Processes of Hydraulic Braking System of Vehicle
p.296

The Robust Control of Magnetic Suspension with Rapidly Changing of Rotor Speed
p.302

Diagnostics Modeling of Vertical Rotor Vibration
p.308

Finite Element Modeling and Simulation of Squeezed-Film Effects in a Vibrating MEMS Structure
p.314

Frequency Domain Identification of the Active Beam Model for the Vibration Control System
p.320

Identification of Discrete Mass-Stiffness Models for Dynamic Analysis of Rotors
p.326

Low-Cycle Fatigue Simulation and Life-Time Prediction of High Stressed Structures
p.333

Multibody and Electromechanical Modelling in Dynamic Balancing of Mechanisms for Mechanical and Electromechanical Systems
p.339

HomeSolid State PhenomenaSolid State Phenomena Vols. 147-149Finite Element Modeling and Simulation of...

Finite Element Modeling and Simulation of Squeezed-Film Effects in a Vibrating MEMS Structure

Abstract:

This paper presents results of numerical analysis of dynamics of a microstructure under the influence of air damping, which is modeled by linearized compressible Reynolds equation. Developed finite element model accounts for air rarefaction and is valid in a wide pressure range. Simulation results indicate that the influence of air damping may result not only in a pronounced dissipative effect but also in natural frequency shift due to system stiffening caused by air compression. This phenomenon is observed under combination of particular values of system and excitation parameters