A Model for Formation and Consumption of Transient Phase

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Abstract:

The phase formation sequence of Ni silicide for different thicknesses is studied by in situ X ray diffraction and differential scanning calorimetry measurements. The formation of a transient phase is observed during the formation of δ-Ni2Si; transient phases grow and disappear during the growth of another phase. A possible mechanism is proposed for the transient phase formation and consumption. It is applied to the growth and consumption of θ-Ni2Si. A good accordance is found between the proposed model and in situ measurement of the kinetics of phase formation obtained by x-ray diffraction and differential scanning calorimetry for higher thickness.

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Solid State Phenomena (Volumes 172-174)

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646-651

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June 2011

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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[1] R. Mukai, S. Ozawa and H. Yagi, Thin Solid Films, 270, 567 (1995).

Google Scholar

[2] W.K. Chu, S.S. Lau, et al. Thin Solid Films, 25, 393 (1975).

Google Scholar

[3] F. M. d'Heurle, P. Gas, J. Mater. Res. 1, 205 (1986).

Google Scholar

[4] C. Lavoie, F. M. d'Heurle, C. Detavernier, and C. Cabral, Microelec. Eng., 70 (2003) 144.

Google Scholar

[5] J. A. Kittl, M. A. Pawlak, C. Torregiani, et al, Appl. Phys. Lett. 91, 172108 (2007).

Google Scholar

[6] C. Van Bockstael, K. De Keyser, et al, Appl. Phys. Lett. 94, 033504 (2009).

Google Scholar

[7] P. Nash and A. Nash, Bulletin of alloys phase diagrams 8, 6 (1987).

Google Scholar

[8] C. Coia, Ph.D. Thesis, Université Polytechnique de Montréal, Canada (2008).

Google Scholar

[9] U. Gosele and K. N. Tu, Journal of Applied Physics 53 (4), 3252-3260 (1982).

Google Scholar

[10] F. M. d'Heurle, J. Mater. Res. 3, 167(1988).

Google Scholar

[11] K. Hoummada, A. Portavoce, et al, Appl. Phys. Lett. 92, 133109(2008).

Google Scholar

[12] K. R. Coffey, L. A. Clevenger, K. Barmak, et al, Appl. phys Lett. 55 (9), 852 (1989).

Google Scholar

[13] E. Ma, L. A. Clevenger and C. V. Thompson, J. Mater. Res., 7 (6) 1350 (1992).

Google Scholar

[14] D. Mangelinck, K. Hoummada and I. Blum, Appl. Phys. Lett. 95, 181902 (2009).

Google Scholar

[15] R.C.J. Schiepers, Ph.D. Thesis, Technische Universiteit Eindoven, The Netherlands (1990).

Google Scholar