Structure and Morphology of Thin Films Deposited by Pulsed Laser Deposition Technique

Agnieszka Radziszewska

doi:10.4028/www.scientific.net/SSP.186.160

Paper Titles

Degradation of Microstructure after Service in ZhS6k Superalloy with Diffusive Aluminide Coating
p.143

High Temperature Deformation of Superalloy Inconel 718
p.147

Structural Perfection of a Single Crystal Nickel-Based CMSX-4 Superalloy
p.151

Structure-Property Relationship in a Haynes^® 242^TM Alloy Subjected to Long-Term Exposure at 650°C
p.156

Structure and Morphology of Thin Films Deposited by Pulsed Laser Deposition Technique
p.160

Microstructure Investigation in Thin Films WO₃ Produced by Pulsed Laser Deposition
p.164

Microstructural Investigations of Ca and La Doped CoO Thin Films Prepared by Pulsed Laser Deposition Technique
p.168

THEED Study of CrTe Thin Films Obtained by Pulsed Laser Deposition
p.172

Tem and CL Investigations of Pd Nanograins Included in Carbonaceous Film
p.177

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Structure and Morphology of Thin Films Deposited by Pulsed Laser Deposition Technique

Abstract:

The paper presented the structure (TEM), morphology and chemical composition (EDS) of the -Al-Mg thin films and Al-Mg-Ni multilayer obtained by pulsed laser deposition (PLD). This films were deposited using Nd:YAG laser. The different process parameters were applied. The Al-Mg film was obtained by application of the laser wavelength (=355 nm) and substrate temperature (Ts) 200 oC. Whereas the Al-Mg-Ni multilayer was produced at lower laser wavelength (=266 nm) and at room temperature of the substrate. For preparation of both films the same laser fluence (q=4.7 J/cm2) was used. The Al-Mg possessed nanocrystalline structure with the areas where only columnar Al crystals occurred. EDS of this thin film exhibited that in the nanocrystalline areas the chemical composition corresponded to the target content of Al and Mg. While Al-Mg-Ni multilayer composed of six layers. In this case Al-Mg layers were thinner then Ni layers. In the multilayer structure the fcc Al0.65Mg0.35 and fcc Ni phases was revealed.