Secondary Electron Detector with the Unipotential Lens Structure for Variable Pressure/Environmental SEM

Witold Słówko; Michał Krysztof

doi:10.4028/www.scientific.net/SSP.186.24

Paper Titles

Characterization of Grain Boundary Geometry in the TEM, Exemplified in Si Thin Films
p.7

Orientation and Phase Mapping in TEM Microscopy (EBSD-TEM Like): Applications to Materials Science
p.13

The Art and Application of Large Angle Convergent Beam Electron Diffraction
p.16

Cathodoluminescence and Electroluminescence of Semiconductor Structures in SEM
p.20

Secondary Electron Detector with the Unipotential Lens Structure for Variable Pressure/Environmental SEM
p.24

A Quantitative Analytical Method for the Identification and Characterization of Mineralized Nanoparticles in Food Supplements
p.28

Physical and Chemical Studies of Bacterial Bioaerosols at Wastewater Treatment Plant Using Scanning Electron Mikroscopy and X-Ray Photoelectron Spectroscopy
p.32

3D Imaging and Metrology of Yttria Dispersoids in INCOLOY MA956 by Electron Tomography
p.37

3D Imaging of Strengthening Particles in Cr-V-Mo (13HMF) Steel Using FIB/SEM Tomography
p.41

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Secondary Electron Detector with the Unipotential Lens Structure for Variable Pressure/Environmental SEM

Abstract:

To extend capabilities of classic instruments toward the VP/E technique, authors designed the vacuum-detector system in the form of a simple attachment, which can be mounted to a classic SEM, without changes in its original structure. The main part of the system is the vacuum and detection head, combining the intermediate chamber and electron detectors of chosen kinds. Authors investigate the SE detector showing the unipotential lens structure to find optimum solution for a wide range of gas pressures from high vacuum to pressures exceeding 10 mbar.