The Influence of the Angle of Incidence in Megasonic Cleaning

Abstract:

The megasonic cleaning efficiency is evaluated as a function of the angle of incidence of acoustic waves on a Si wafer. Acoustic Schlichting streaming alone is not able to remove nanoparticles smaller than 400 nm. It is shown that oscillating or collapsing behavior of bubbles are responsible for removing nanoparticles smaller than 400 nm during a cleaning process with ultrasound. Optimal particle removal efficiency is obtained around the angle of acoustic transmission of the silicon wafer.

• Periodical: Solid State Phenomena (Volume 187)
• Pages: 163-166
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.187.163
• Online since: April 2012
• Authors: Steven Brems, Marc Hauptmann, Elisabeth Camerotto, Xiu Mei Xu, Stefan De Gendt, Marc Heyns, Paul W. Mertens
• Keywords: Acoustic Streaming, Angle of Incidence, Megasonic Cleaning, Particle Removal

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