A Reconfigurable Control System for a PA-PVD Technology Test Stand

Abstract:

The construction of technological test stands is connected with the problem of a proper determination of the structure of the stands enabling the execution of technological processes with different types of instruments and devices. The article presents the test stand for Plasma–Assisted Physical Vapour Deposition (PA-PVD) technological processes. The configurability of the stand was achieved thanks to the modular structure of the stand and the use of appropriate software and hardware solutions. The authors describe the developed solution facilitating the execution of plasma processes applied for surface engineering.

• Periodical: Solid State Phenomena (Volumes 220-221)
• Pages: 504-509
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.220-221.504
• Online since: January 2015
• Authors: Jan Przybylski*, Andrzej Majcher, Mirosław Neska
• Keywords: Control System, Electron Gun, PA-PVD, System Structure, Test Stand

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