Multitarget Sputtering of Piezoelectric Mixed Oxide Thin Films onto Flexible Substrates

Anja Kleiner; Gunnar Suchaneck; Alexandr Dejneka; Lubomir Jastrabik; Vasily Lavrentiev; Dmitry A. Kiselev; Gerald Gerlach

doi:10.4028/www.scientific.net/SSP.230.3

Paper Titles

Preface and Conference Board

Multitarget Sputtering of Piezoelectric Mixed Oxide Thin Films onto Flexible Substrates
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Multitarget Sputtering of Piezoelectric Mixed Oxide Thin Films onto Flexible Substrates

Abstract:

Large area film deposition was performed by means of multitarget reactive magnetron sputtering from metallic targets (Pb, Ti, Zr) with a diameter of 200 mm onto Cu-coated Kapton® HN substrates. High-power pulse sputtering has been employed for the Zr-target (or alternatively for the Ti-target). Film composition profiles were evaluated by XPS and RBS. Piezoelectric properties were investigated by PFM.

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Solid State Phenomena (Volume 230)

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3-7

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.230.3

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Online since:

June 2015

Authors:

Anja Kleiner*, Gunnar Suchaneck, Alexandr Dejneka, Lubomir Jastrabik, Vasily Lavrentiev, Dmitry A. Kiselev, Gerald Gerlach

Keywords:

Complex Oxide Film Deposition, Composition Profile, Flexible Polymer Substrate, Kapton, Multitarget Reactive Magnetron Sputtering, PFM, Piezoresponse Force Microscopy, PZT, XPS

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References

[1] J. Lim, J. Kim, Y. J. Yoon, H. Kim, H. G. Yoon, S. -N. Lee, J. Kim, All-inkjet-printed metal-insulator-metal (MIM) capacitor, Current Applied Physics 12 (2012) e14-e17.

DOI: 10.1016/j.cap.2011.04.035

Google Scholar

[2] S. Courrèges, B. Lacroix, A. Amadjikpe, S. Phillips, Z. Zhao, K. Choi, A. Hunt, and J. Papapolymerou, Back-to-back tunable ferroelectric resonator filters on flexible organic substrates, IEEE Trans. Ultrason. Ferroel. Freq. Control. 57 (2010).

DOI: 10.1109/tuffc.2010.1547

Google Scholar

[3] F. Honda, T. Hosono, M. Fujino, T. Suga, M. Ichiki and T. Itoh, Relationship between diffusion and adhesion properties of ferroelectric thin-film structure on releasable substrate, Jpn. J. Appl Phys. 52 (2013) 06GL16 (4 pages).

DOI: 10.7567/jjap.52.06gl16

Google Scholar

[4] P. Muralt, PZT Thin films for microsensors and actuators: Where do we stand?, IEEE Trans. UFFC 47 (2000), 903-915.

DOI: 10.1109/58.852073

Google Scholar

[5] W. A. MacDonald, Engineered films for display technologies, J. Mater. Chem. 14 (2004) 4-10.

Google Scholar

[6] Z. Hubička, M. Čada, P. Adámek, P. Virostko, J. Olejníček, A. Deyneka, L. Jastrabik, K. Jurek, G. Suchaneck, M. Guenther, G. Gerlach and P. Boháč, Investigation of the RF modulated plasma jet system during the deposition of Pb(ZrxTi1-x)O3 thin films on polymer substrates, Surf. Coat. Technol. 200, (2005).

DOI: 10.1016/j.surfcoat.2005.02.041

Google Scholar

[7] G. Suchaneck, Z. Hubicka, A. Dejneka, M. Guenther, S. Günther, B. Meyer, L. Jastrabik and G. Gerlach, Deposition of PZT thin films on copper-coated polymer foils – challenges and perspectives, Ferroelectrics 379 (2009) 107-112.

DOI: 10.1080/00150190902851820

Google Scholar

[8] G. Suchaneck, R. Labitzke, B. Adolphi, L. Jastrabik, P. Adamek, J. Drahokoupil, Z. Hubicka, D.A. Kiselev, A.L. Kholkin, G. Gerlach and A. Dejneka, Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering, Surf. Coat. Technol. 205, Suppl. 2 (2011).

DOI: 10.1016/j.surfcoat.2011.02.050

Google Scholar

[9] J. -N. Kim, K. -S. Shin, D. -H. Kim, B. -O. Park, N. -K. Kim, S. -M. Cho, Changes in chemical behavior of thin film lead zirconate titanate during Ar+-ion bombardment using XPS, Appl. Surf. Sci. 206 (2003) 119-128.

DOI: 10.1016/s0169-4332(02)01229-1

Google Scholar

[10] L. R. Doolittle, A semiautomatic algorithm for rutherford backscattering analysis, Nucl. Instrum. Methods Phys. Res. Sect. B 15 (1986) 227–231.

Google Scholar

[11] B. Jaffe, W. Cook, H. Jaffe, Piezoelectric Ceramics, Academic Press, New York, (1971).

Google Scholar

[12] A. Wu, et al., Domain populations in lead zirconate titanate thin films of different compositions via piezoresponse force microscopy, Nanotechnology 16 (2005) 2587-2595.

DOI: 10.1088/0957-4484/16/11/020

Google Scholar