Ti-TiN Multilayer Coatings Obtained by ION FLUX Surface Modification

S.R. Shekhtman; M.S. Migranov

doi:10.4028/www.scientific.net/SSP.265.141

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HomeSolid State PhenomenaSolid State Phenomena Vol. 265Ti-TiN Multilayer Coatings Obtained by ION FLUX...

Ti-TiN Multilayer Coatings Obtained by ION FLUX Surface Modification

Abstract:

We present a production technology for multilayer vacuum plasma coatings with additional ion bombardment, which is implemented with two methods: by using the hollow cathode effect and by using the self-maintained discharge generated by the plasma generator. Based on this technology, a technology of producing multilayer coatings based on TiN was developed.

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Periodical:

Solid State Phenomena (Volume 265)

Pages:

141-145

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.265.141

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Online since:

September 2017

Authors:

S.R. Shekhtman*, M.S. Migranov

Keywords:

Hollow Cathode Effect, Plasma Source, Submicrocrystalline Structure, Technology, Vacuum Ion-Plasma Coatings

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