Visualization of Acoustic Waves and Cavitation in Ultrasonic Water Flow

Hidehisa Usui; Tomoatsu Ishibashi; Hisanori Matsuo; Katsuhide Watanabe; Keita Ando

doi:10.4028/www.scientific.net/SSP.314.186

Paper Titles

Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
p.161

New Test Structure Development for Pattern Collapse Evaluations
p.167

Breakthrough of Sublimation Drying by Liquid Phase Deposition
p.172

Estimation of the Generation Rate of H· Radicals in a Megasonic Field Using an Electrochemical Technique
p.181

Visualization of Acoustic Waves and Cavitation in Ultrasonic Water Flow
p.186

Simulation of Rayleigh Bubble Growth near a No-Slip Rigid Wall
p.192

Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
p.197

Interaction between Free-Surface Oscillation and Bubble Translation in a Megasonic Cleaning Bath
p.202

Study on Uniform Deposition on 300 mm Silicon Wafer with Sub-100 nm Sized Particles for Cleaning Application
p.209

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Visualization of Acoustic Waves and Cavitation in Ultrasonic Water Flow

Abstract:

Visualization experiments were performed to examine whether acoustic bubbles play a role in ultrasonic water flow cleaning, as in convention cleaning with ultrasonic baths. Schlieren visualization confirmed the standing-wave-like acoustic field in ultrasonic water flow that collides with a glass surface. Backlight visualization showed that cavitation bubbles appear in the water flow spreading over the glass surface. These bubbles are found to oscillate in volume and move inside film flow and thus expected to play a role as active cleaning agents.

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