Paper Titles

ULSI Technology - a Complex Device Manufacturing Process
p.1

Semiconductor Isotope Engineering
p.11

Crystalline Silicon for Solar Cells
p.21

Light-Emitting Porous Silicon: A Defective Quantum Sponge Structure?
p.27

Semiconducting Silicide-Silicon Heterostructures
p.39

What Local-Density Calculations Can Teach about Semiconductor Surfaces, Interfaces and Defects
p.51

Mechanisms of Transition Metal Gettering in Silicon
p.57

Gettering in Silicon under Vacancy Generation Conditions
p.71

HomeSolid State PhenomenaSolid State Phenomena Vols. 32-33ULSI Technology - a Complex Device Manufacturing...

ULSI Technology - a Complex Device Manufacturing Process

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Gettering and Defect Engineering in Semiconductor Technology V

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Periodical:

Solid State Phenomena (Volumes 32-33)

Pages:

1-10

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.32-33.1

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Online since:

December 1993

Authors:

S.J. Hillenius

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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