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HomeSolid State PhenomenaSolid State Phenomena Vols. 32-33Gettering in Silicon under Vacancy Generation...

Gettering in Silicon under Vacancy Generation Conditions

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Gettering and Defect Engineering in Semiconductor Technology V

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Periodical:

Solid State Phenomena (Volumes 32-33)

Pages:

71-76

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.32-33.71

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Online since:

December 1993

Authors:

Nikolai T. Bagraev, L.E. Klyachkin, V.L. Sukhanov

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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