Phosphorus External Gettering Efficiency in Multicrystalline Silicon Wafers

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Periodical:

Solid State Phenomena (Volumes 32-33)

Edited by:

H.G. Grimmeiss, M. Kittler and H. Richter

Pages:

77-82

DOI:

10.4028/www.scientific.net/SSP.32-33.77

Citation:

I. Périchaud et al., "Phosphorus External Gettering Efficiency in Multicrystalline Silicon Wafers", Solid State Phenomena, Vols. 32-33, pp. 77-82, 1993

Online since:

December 1993

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Price:

$35.00

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