NiCo Electroforming Research on Ru/c Multilayer Film for Mirror Production

Article Preview

Abstract:

The metal/C-based multilayer film with high reflectivity is the “workhorse” in today's optical application, and NiCo electroforming offers a promising prospect in contemporary optical production. Therefore, the NiCo electroforming was performed on metal/C-based multilayer film in this study, and the obtained deposition structure and electrochemical mechanism were discussed. The results show that the Ni electrodeposition on Ru/C multilayer film obeyed the three-dimensional (3D) continuous nucleation process under diffusion control, which was in accordance with the crystal growth characteristics. This work confirmed the feasibility of direct NiCo electroforming on Ru/C multilayer film, and provided a theoretical backing for the fabrication of metal/C-based multilayer mirror.

You might also be interested in these eBooks

Info:

Periodical:

Solid State Phenomena (Volume 369)

Pages:

51-56

Citation:

Online since:

March 2025

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2025 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] R.M. Smertin, N.I. Chkhalo, V.N. Polkovnikov, N.N. Salashchenko, R.A. Shaposhnikov, and S.Yu. Zuev. Highly reflective Mo/Be/Si multilayer mirrors with zero stress values for 13.5 nm wavelength. THIN SOLID FILMS. Vol. 782, (2023), p.140044

DOI: 10.1016/j.tsf.2023.140044

Google Scholar

[2] M. Saedi, C. Sfiligoj, J. Verhoeven, and J.W.M. Frenken. Effect of rubidium incorporation on the optical properties and intermixing in Mo/Si multilayer mirrors for EUV lithography applications. APPL. SURF. SCI. Vol. 507, (2020), p.144951

DOI: 10.1016/j.apsusc.2019.144951

Google Scholar

[3] N. Kumar, A.V. Nezhdanov, S.A. Garakhin, R.M. Smertin, P.A. Yunin , V.N. Polkovnikov, N.I. Chkhalo, and A.I. Mashin. Investigation of transverse optical phonon of thin Si films embedded in periodic Mo/Si and W/Si multilayer mirrors. SURF. INTERFACES. Vol. 25, (2021), p.101270

DOI: 10.1016/j.surfin.2021.101270

Google Scholar

[4] H.J. Biswal, J.J. Kaur, and P.R. Vundavilli. Recent advances in energy field assisted hybrid electrodeposition and electroforming processes. CIRP. J. MANUF. SCI. TEC. Vol. 38 (2022), p.518

DOI: 10.1016/j.cirpj.2022.05.013

Google Scholar

[5] H.G. Zhang, N. Zhang, F.Z. Fang. Investigation of mass transfer inside micro structures and its effect on replication accuracy in precision micro electroforming. INT. J. MACH. TOOL. MANU. Vol. 165, (2021), p.103717

DOI: 10.1016/j.ijmachtools.2021.103717

Google Scholar

[6] W.Y. Tan, H.W. He, Y. Gao, Y.Z. Peng, and X.M. Dai. Nucleation and growth mechanisms of an electrodeposited Ni–Se–Cu coating on nickel foam. J. COLLOID. INTERF. SCI. Vol. 600 (2021), p.492

DOI: 10.1016/j.jcis.2021.05.002

Google Scholar

[7] R. Asseli, M. Benaicha, S. Derbal, M. Allam, and O. Dilmi. Electrochemical nucleation and growth of Zn-Ni alloys from chloride citrate-based electrolyte. ELECTROANAL. CHEM. Vol. 847, (2019), p.113261

DOI: 10.1016/j.jelechem.2019.113261

Google Scholar

[8] Y.L. Zhu, Y. Katayama, and T. Miura. Effects of acetonitrile on electrodeposition of Ni from a hydrophobic ionic liquid. ELECTROCHIM. ACTA. Vol. 55 (28): (2010), p.9019

DOI: 10.1016/j.electacta.2010.07.097

Google Scholar

[9] S.H. Wang, X.W. Guo, H.Y. Yang, J.C. Dai, R.Y. Zhu, J. Gong, L.M. Peng, and W.J. Ding. Electrodeposition mechanism and characterization of Ni–Cu alloy coatings from a eutectic-based ionic liquid. APPL. SURF. SCI. Vol. 288: (2014), p.530

DOI: 10.1016/j.apsusc.2013.10.065

Google Scholar

[10] A. Bakkar, and V. Neubert. Electrodeposition of photovoltaic thin films from ionic liquids in ambient atmosphere: Gallium from a chloroaluminate ionic liquid. ELECTROANAL. CHEM. Vol. 856, (2020), p.113656

DOI: 10.1016/j.jelechem.2019.113656

Google Scholar

[11] I.M.A. Omar, M. Aziz, and K.M. Emran. Impact of ionic liquid [FPIM]Br on the electrodeposition of Ni and Co from an aqueous sulfate bath. J MATER RES. TECHNOL. Vol. 12: (2021), p.170

DOI: 10.1016/j.jmrt.2021.02.066

Google Scholar