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HomeSolid State PhenomenaSolid State Phenomena Vols. 37-38Desorption Energy of Oxygen Adsorbed on...

Desorption Energy of Oxygen Adsorbed on Un-Intentionally Doped Low Pressure Chemical Vapor Deposited Silicon Films

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Polycrystalline Semiconductors III

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Periodical:

Solid State Phenomena (Volumes 37-38)

Pages:

151-156

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.37-38.151

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Online since:

March 1994

Authors:

D. Mostefa, B. Fortin, F. Raoult, M. Sarret, G. Rossé, O. Bonnaud

Keywords:

Aging, Chemisorption, Desorption, Electrical Conductivity, Ionosorption, Poly-Silicon

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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