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HomeSolid State PhenomenaSolid State Phenomena Vols. 37-38Segregation and Precipitation of Platinum...

Segregation and Precipitation of Platinum Silicides in Si/SiO₂ Interfaces and Dislocations

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Polycrystalline Semiconductors III

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Periodical:

Solid State Phenomena (Volumes 37-38)

Pages:

157-162

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.37-38.157

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Online since:

March 1994

Authors:

B. Laurent, Dominique Mangelinck, Bernard Pichaud, André Lhorte, J.B. Quoirin

Keywords:

Cooling Treatments, Dislocation, Fast Rectifiers, Platinum Doping, Platinum Silicides Precipitation, Reverse Characteristics, Si/SiO₂ Interface

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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