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HomeSolid State PhenomenaSolid State Phenomena Vol. 54Humidity Sensor Based on Partially Oxidized Porous...

Humidity Sensor Based on Partially Oxidized Porous Silicon

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Periodical:

Solid State Phenomena (Volume 54)

Pages:

75-85

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.54.75

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Online since:

August 1997

Authors:

Marco Balucani, V. Bondarenko, L. Dolgyi, S. La Monica, G. Maiello, G. Masini, V. Yakovtseva, A. Ferrari

Keywords:

Humidity Sensor, Porous Silicon (PS), Sensor

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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