Humidity Sensor Based on Partially Oxidized Porous Silicon

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Periodical:

Solid State Phenomena (Volume 54)

Edited by:

Aldo Ferrari

Pages:

75-85

DOI:

10.4028/www.scientific.net/SSP.54.75

Citation:

M. Balucani et al., "Humidity Sensor Based on Partially Oxidized Porous Silicon", Solid State Phenomena, Vol. 54, pp. 75-85, 1997

Online since:

August 1997

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$35.00

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