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HomeSolid State PhenomenaSolid State Phenomena Vol. 55Direct Microfabrication of Chalcogenide Glasses by...

Direct Microfabrication of Chalcogenide Glasses by Light and Electron-Beam Exposures

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Semiconductor Materials and Technology (ICSMT)

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Periodical:

Solid State Phenomena (Volume 55)

Pages:

153-158

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.55.153

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Online since:

August 1997

Authors:

Kenji Tanaka, Naoaki Yoshida

Keywords:

Chalcogenide Glass, Electron-Beam, Grating, Ionic Migration, Micro-Lens, Micropattern, Photoexpansion

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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