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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Low-Temperature Silicon Epitaxy by Ion-Assisted...

Low-Temperature Silicon Epitaxy by Ion-Assisted Deposition

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Abstract:

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Polycrystalline Semiconductors V

Info:

Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

459-464

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.459

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Online since:

April 1999

Authors:

L. Oberbeck, R.B. Bergmann, N. Jensen, S. Oelting, Jens Werner

Keywords:

In Situ Doping, Silicon Epitaxy, Thin Film

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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