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HomeSolid State PhenomenaSolid State Phenomena Vols. 67-68Cubic Silicon Carbide Films Grown by Reactive...

Cubic Silicon Carbide Films Grown by Reactive Magnetron Sputtering at Relatively Low Temperature

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Abstract:

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Polycrystalline Semiconductors V

Info:

Periodical:

Solid State Phenomena (Volumes 67-68)

Pages:

477-484

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.67-68.477

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Online since:

April 1999

Authors:

S. Kerdiles, F. Gourbilleau, Richard Rizk, J.L. Pérez-Rodríguez, B. Garrido, O. González-Varona, L. Calvo-Barrio, J.R. Morante

Keywords:

Electron Microscopy, Nano Grain, Silicon Carbide (SiC), Sputtering

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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