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HomeSolid State PhenomenaSolid State Phenomena Vols. 80-81Excimer Laser Crystallized Poly-Si Thin-Film...

Excimer Laser Crystallized Poly-Si Thin-Film Transistors on a Plastic Substrate with Mobility of 250 cm²/V.s

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Periodical:

Solid State Phenomena (Volumes 80-81)

Pages:

169-174

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.80-81.169

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Online since:

November 2001

Authors:

Dharam P. Gosain, A. Machida, S. Usui, Masao Arai

Keywords:

Excimer Laser, Plastic Substrates, Poly-Silicon, Thin Film Transistor

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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