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HomeSolid State PhenomenaSolid State Phenomena Vols. 80-81Morphological Characterization of Polysilicon...

Morphological Characterization of Polysilicon Films Laser-Annealed in Argon Ambient

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Polycrystalline Semiconductors VI

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Periodical:

Solid State Phenomena (Volumes 80-81)

Pages:

175-180

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.80-81.175

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Online since:

November 2001

Authors:

Youri Helen, Gaёl Gautier, K. Mourgues, F. Raoult, T. Mohammed-Brahim, R. Rogel, O. Bonnaud, C. Prat, D. Lemoine

Keywords:

Atomic Force Microscope (AFM), Excimer Laser Crystallization, Polycrystalline Thin-Film Transistors

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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