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HomeSolid State PhenomenaSolid State Phenomena Vol. 93High-Density Microwave Plasma-Enhanced Chemical...

High-Density Microwave Plasma-Enhanced Chemical Vapor Deposition of Crystalline Silicon Films for Solar Cell Devices

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

109-114

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.109

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Online since:

June 2003

Authors:

Hajime Shirai, Go Ohkawara, Masanobu Nakajima

Keywords:

High Rate Deposition, Microcrystalline Silicon, Microwave Plasma, Solar Cell

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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