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HomeSolid State PhenomenaSolid State Phenomena Vol. 93Very Thin Amorphous and Microcrystalline Silicon...

Very Thin Amorphous and Microcrystalline Silicon Films Deposited by Hot-Wire Chemical Vapour Deposition for Photovoltaic Applications

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Abstract:

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

87-98

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.87

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Online since:

June 2003

Authors:

Urban Weber, Chandrachur Mukherjee, Markus Kupich, Bernd Schröder

Keywords:

Amorphous Silicon, Doping, Hot-Wire Chemical Vapour Deposition, Microcrystalline Silicon, Solar Cell

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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