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HomeSolid State PhenomenaSolid State Phenomena Vol. 93High Quality Polycrystalline Silicon Thin Film...

High Quality Polycrystalline Silicon Thin Film Transistors Fabricated from Laser-Irradiated Sputtered Si Films

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

61-66

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.61

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Online since:

June 2003

Authors:

Tadashi Serikawa

Keywords:

Ar-Laser Crystallization, Furnace-Hydrogenation, Polycrystalline Silicon, Sputter Deposition, Thin Film Transistor

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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